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We experimentally demonstrate slow light photonic crystal waveguide (PCW) and subwavelength waveguide (SWWG) loop terminated Mach-Zehnder interferometer (LT-MZI) sensors in a foundry-fabricated silicon-on-insulator (SOI) platform. We compare the experimental results on sensitivity and limit of detection (LOD) on the interferometer sensors with microcavity-type sensors. We show experimentally that 2-D PCW interferometers have higher phase sensitivities than SWWGs of the same length. Based on experimental results, 20- μ m-long 2-D PCW LT-MZI sensors and 200- μ m-long SWWG LT-MZI sensors achieve an LOD of 3.4×10−4 and 2.3×10−4 RIU, respectively, with nearly the same insertion losses in foundry-fabricated devices. We show that by considering the various sources of loss in our benchtop fiber-to-fiber photonic integrated circuit measurement system, it will be possible to reach 10−7 LOD in both slow light PCW and SWWG-based LT-MZI sensors with on-chip integrated light sources and detectors. We show via simulations and experiment that the LOD of a 20- μ m-long slow light PCW LT-MZI is equivalent to that of a 100- μ m-long SWWG LT-MZI, thus enabling more compact LT_MZI sensors when using slow light PCWs versus SWWGs 

We experimentally demonstrated slow wave enhanced phase and spectral sensitivity in asymmetric Michelson interferometer sensors with a phase sensitivity 277,750 rad/RIU-cm and theoretical phase sensitivity as high as 461,810 rad/RIU-cm. In the context of low-cost chip integrated photonic packaged sensors, in this paper we will experimentally demonstrate a method for active tuning of interferometer fringes using phase change materials that will potentially overcome fabrication induced variation of interference fringe wavelengths, thus allowing sensor chip packaging with a fixed wavelength laser and available integrated photodetectors.